STUDY OF MANUFACTURING DEFECTS IN THE TECHNOLOGY OF MANUFACTURING MOEMS SEMICONDUCTOR SUBSTRATES FOR TECHNICAL AUTOMATION MEANS


Abstract views: 114 / PDF downloads: 27

Authors

DOI:

https://doi.org/10.5281/zenodo.10370530

Keywords:

technical automation means, defect, technological process, MEMS, MOEMS, substrate, diffusion, defect engineering.

Abstract

Today, in the context of the widespread use of digital, network and intelligent technologies, and the continuous development of integrated production innovations, major and profound changes are taking place in the philosophy of modern industry development. Such changes set manufacturers the task of automating production process control in real time, which involves creating a single enterprise information space that links together the technological and business levels of enterprise management, while solving many of the most important tasks for an industrial enterprise.

Integration of the cyber component allows automating the management of production processes through the use of intelligent mechatronic modules, expert systems and large data sets for production forecasting. In this context, a person controls processes at the physical level through a cybernetic system. At the same time, this system with minimal human involvement allows: automatic control of the vehicle at the physical level, analysis and decision-making in real time. Systems of this type are multilevel. At the lower level, accurate and reliable systems such as microelectromechanical and micro-optomechanical are used. They collect, process, and transmit information in the control of technological systems. The accuracy and durability of MEMS and MOEMS depends on the technology of their manufacture.

The aim of this work is to increase the efficiency of control by using proximity sensors based on MEMS and MOEMS as part of technical automation means

References

Nevliudov, V. Bortnikova, O. Chala, and S. Maksymova, “Modeling MEMS Membranes Characteristics,” 2018 XXVI-th International Ukrainian-Polish Scientific and Technical Conference CAD in machinery design implementation and educational issues (CADMD), Lviv, 2018, pp. 61-68.

Yan, D., Li, H., Chen, C., Zou, Y., & Wang, S. (2019). Defect engineering strategies for nitrogen reduction reactions under ambient conditions. Small Methods, 3(6), 1800331.

Wang, Qichen, et al. "Defect engineering in earth-abundant electrocatalysts for CO 2 and N 2 reduction." Energy & Environmental Science 12.6 (2019): 1730-1750.

O. Chala, A. Bronnikov, N. Igor and D. Mospan, "The Use of Neural Networks for the Technological Objects Recognition Tasks in Computer-Integrated Manufacturing," 2022 IEEE 4th International Conference on Modern Electrical and Energy System (MEES), Kremenchuk, Ukraine, 2022, pp. 1-5, doi: 10.1109/MEES58014.2022.10005750.

Nevliudov I., Yevsieiev V., Maksymova S., Filippenko I. Development of an architectural-logical model to automate the management of the process of creating complex cyber-physical industrial systems. Eastern-European Journal of Enterprise Technologies. Vol 4. No 3(106). C.44–52. DOI: 10.15587/1729- 4061.2020.210761

Невлюдов I.Ш., Євсєєв В.В., Бортнікова В.О. Розробка програмного модуля для автоматизованого проектування технологічного процесу виготовлення мікроелектромеханічних акселерометрів. Системи управління, навігації та зв’язку. Збірник наукових прац. (2015). Випуск 3(35). С 107–112

Cebeci, U. (2019). The Project Management of Industry 4.0 Strategy for Software Houses. In Agile Approaches for Successfully Managing and Executing Projects in the Fourth Industrial Revolution , P. 228–241, DOI:10.4018/978-1- 5225-7865-9.ch012.

Igor Nevliudov, Iryna Botsman, Olena Chala, Kirill Khrustalev. Automated System Development for the Printed Circuit Boards Optical Inspection Using Machine Learning Methods // Proceedings of the 10-th International Scientific and Technical Conference «Information systems and technologies (IST-2021)». – Odesa, September 13-19, 2021. – РР. 234-238

O. Filipenko, O.Chala, V. Bortnikova, O. Sychova and I. Botsman, "Impact of Technological Operations Parameters on Moems Components Formation,"2019 IEEE 8th International Conference on Advanced Optoelectronics and Lasers (CAOL), 2019, pp. 371-374

Peng Wang, Shiqi Zhang, Zhaobo Wang, Yuhan Mo, Xiaoyang Luo, Fan Yang, Meili Lv, Zhaoxiang Li, Xuanwen Liu, Manganese-based oxide electrocatalysts for the oxygen evolution reaction: a review, Journal of Materials Chemistry A, 10.1039/D2TA09039B, 11, 11, (5476-5494), (2023).

Sivakumar, P., Raj, C. J., Park, J., & Jung, H. (2022). Facile fabrication of flower-like binary metal oxide as a potential electrode material for high-performance hybrid supercapacitors. Ceramics International, 48(7), 9459-9467.

I.Nevliudov, M.Omarov, O.Chala, Eskisehir Techn. Univer. J. Sci. Techn. A -Appl. Sci. Engin., 21, 113 (2020). https://doi.org/10.18038/estubtda.823088

Luo, Dan, et al. "Integrating Nanoreactor with O–Nb–C Heterointerface Design and Defects Engineering Toward High‐Efficiency and Longevous Sodium Ion Battery." Advanced Energy Materials 12.18 (2022): 2103716.

I. Nevliudov, О. Chala, І. Botsman Mathematical Model of Substrates Formation for Functional Components of Microoptoelectromechanical Sensors Manufacturing & Mechatronic Systems 2021: Proceedings of Vst International Conference, Kharkiv, October 21-22, 2021. P. 15-17.

Osadchy, S., Demska, N., Oleksandrov, Y. and Nevliudova, V. (2021) “Research of Dikw and 5c Architectural Models for Creation of Cyber-Physical Production Systems Within the Concept of Industry 4.0”, Innovative technologies and scientific solutions for industries, (1 (15), pp. 132-140

Чала О. О. Фізико технологічна база для побудови математичної моделі прогнозування дефектв у підкладках функціональних компонентів МОЕМС / О. О. Чала, І. Ш. Невлюдов, В. В. Невлюдова // VIІ Міжнародна науково-практична конференція «Напівпровідникові матеріали, інформаційні технології та фотовольтаїка»: Тези доповідей. − Кременчук: Кременчуцький національний університет імені Михайла Остроградського, 2022. – С. 32-33.

L. Zhang, Y. Dong and J. Wang Wind Speed Forecasting Using a Two-Stage Forecasting System With an Error Correcting and Nonlinear Ensemble Strategy. IEEE Access. Vol. 7, P. 176 000-176023, 2019.

Khan, A., Joshi, S., Ahmad, M. A., & Lyashenko, V. (2015). Some Effect of Chemical Treatment by Ferric Nitrate Salts on the Structure and Morphology of Coir Fibre Composites. Advances in Materials Physics and Chemistry, 5(1), 39-45.

Svitlana Maksymova, & Olena Chala. (2023). DEFECT ENGINEERING: APPLICATION IN AUTOMATION SYSTEM COMPONENTS PRODUCTION TECHNOLOGICAL PROCESSES. Multidisciplinary Journal of Science and Technology, 3(3), 243–251. Retrieved from https://mjstjournal.com/index.php/mjst/article/view/226

Lyshenko, V. V., Lyubchenko, V. A., Ahmad, M. A., Khan, A., & Kobylin, O. A. (2016). The Methodology of Image Processing in the Study of the Properties of Fiber as a Reinforcing Agent in Polymer Compositions. International Journal of Advanced Research in Computer Science, 7(1), 15-18

Sotnik, S., Matarneh, R., & Lyashenko, V. (2017). System model tooling for injection molding. International Journal of Mechanical Engineering and Technology, 8(9), 378-390.

Published

2023-12-18

How to Cite

CHALA, O., NEVLIUDOV, I., OMAROV, S., & TESLIUK, S. (2023). STUDY OF MANUFACTURING DEFECTS IN THE TECHNOLOGY OF MANUFACTURING MOEMS SEMICONDUCTOR SUBSTRATES FOR TECHNICAL AUTOMATION MEANS. Journal of Natural Sciences and Technologies, 2(2). https://doi.org/10.5281/zenodo.10370530

Issue

Section

Articles

Most read articles by the same author(s)