CHALA O, NEVLIUDOV I, OMAROV S, TESLIUK S. STUDY OF MANUFACTURING DEFECTS IN THE TECHNOLOGY OF MANUFACTURING MOEMS SEMICONDUCTOR SUBSTRATES FOR TECHNICAL AUTOMATION MEANS. NaSTech [Internet]. 2023 Dec. 18 [cited 2024 May 10];2(2). Available from: https://journalofnastech.com/index.php/pub/article/view/34