CHALA, O.; NEVLIUDOV, I.; OMAROV, S.; TESLIUK, S. STUDY OF MANUFACTURING DEFECTS IN THE TECHNOLOGY OF MANUFACTURING MOEMS SEMICONDUCTOR SUBSTRATES FOR TECHNICAL AUTOMATION MEANS. Journal of Natural Sciences and Technologies, [S. l.], v. 2, n. 2, 2023. DOI: 10.5281/zenodo.10370530. Disponível em: https://journalofnastech.com/index.php/pub/article/view/34. Acesso em: 10 may. 2024.